Research Progress of Crystalline Thin Films by High Power Impulse Magnetron Sputtering at a Low Temperature

doi:10.11933/j.issn.1007-9289.20211213002

BAI Xuebing, CAI Qun, ZHANG Xuhai

China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 105-115.

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China Surface Engineering ›› 2022, Vol. 35 ›› Issue (5) : 105-115. DOI: 10.11933/j.issn.1007-9289.20211213002

Research Progress of Crystalline Thin Films by High Power Impulse Magnetron Sputtering at a Low Temperature

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 35(5): 105-115 https://doi.org/10.11933/j.issn.1007-9289.20211213002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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