Effects of Deposition Pressure and Pulse Frequency on Properties for Si-DLC Films Prepared on Surface of Internal Spline Tooth

doi:10.11933/j.issn.1007-9289.20210902001

XU Tianyang, ZHAN Hua, WANG Yiqi, LI Bihan, SI Yanlong, WANG Ruijun

China Surface Engineering ›› 2022, Vol. 35 ›› Issue (2) : 243-252.

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China Surface Engineering ›› 2022, Vol. 35 ›› Issue (2) : 243-252. DOI: 10.11933/j.issn.1007-9289.20210902001

Effects of Deposition Pressure and Pulse Frequency on Properties for Si-DLC Films Prepared on Surface of Internal Spline Tooth

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2022, 35(2): 243-252 https://doi.org/10.11933/j.issn.1007-9289.20210902001

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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