Effects of O<sub>2</sub> / Ar Flow Ratios and Annealing Treatment on Microstructures and Tribological Properties of Zirconia Films

doi:10.11933/j.issn.1007-9289.20200715001

Effects of O₂ / Ar Flow Ratios and Annealing Treatment on Microstructures and Tribological Properties of Zirconia Films

Xu Wenju, Ju Pengfei, Li Hongxuan, Ji Li, Liu Xiaohong, Chen Jianmin

China Surface Engineering ›› 2020, Vol. 33 ›› Issue (5) : 65-74.

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China Surface Engineering ›› 2020, Vol. 33 ›› Issue (5) : 65-74. DOI: 10.11933/j.issn.1007-9289.20200715001

Effects of O₂ / Ar Flow Ratios and Annealing Treatment on Microstructures and Tribological Properties of Zirconia Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2020, 33(5): 65-74 https://doi.org/10.11933/j.issn.1007-9289.20200715001

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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