Research Progress in Spectroscopic Diagnosis of Plasma Jet Characteristics Under PS-PVD

ZHANG Yan, DENG Changguang, MAO Jie, DENG Ziqian and LUO Zhiwei

China Surface Engineering ›› 2019, Vol. 32 ›› Issue (5) : 55-68.

PDF(21243 KB)
PDF(21243 KB)
China Surface Engineering ›› 2019, Vol. 32 ›› Issue (5) : 55-68. DOI: 10.11933/j.issn.1007-9289.20190315001

Research Progress in Spectroscopic Diagnosis of Plasma Jet Characteristics Under PS-PVD

    {{javascript:window.custom_author_en_index=0;}}
  • {{article.zuoZhe_EN}}
Author information +
History +

HeighLight

{{article.keyPoints_en}}

Abstract

{{article.zhaiyao_en}}

Key words

QR code of this article

Cite this article

Download Citations
{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 32(5): 55-68 https://doi.org/10.11933/j.issn.1007-9289.20190315001

References

References

{{article.reference}}

Funding

RIGHTS & PERMISSIONS

{{article.copyrightStatement_en}}
{{article.copyrightLicense_en}}
PDF(21243 KB)

Accesses

Citation

Detail

Sections
Recommended

/