Effects of Bias Voltage on Structure and Property of Si-DLC Films Fabricated by Self-source Cage Type Hollow Cathode Discharge Process

doi:10.11933/j.issn.1007-9289.20190114002

SUN Weiwei, TIAN Xiubo, LI Muqin, WU Mingzhong, GONG Chunzhi and TIAN Qinwen

China Surface Engineering ›› 2019, Vol. 32 ›› Issue (3) : 69-79.

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China Surface Engineering ›› 2019, Vol. 32 ›› Issue (3) : 69-79. DOI: 10.11933/j.issn.1007-9289.20190114002

Effects of Bias Voltage on Structure and Property of Si-DLC Films Fabricated by Self-source Cage Type Hollow Cathode Discharge Process

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2019, 32(3): 69-79 https://doi.org/10.11933/j.issn.1007-9289.20190114002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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