Effects of Abrasive Particles and Pads’ Characteristics on Ultrasonic Assisted Chemical Mechanical Polishing for Sapphire

doi:10.11933/j.issn.1007-9289.20180824002

ZHONG Min, YUAN Renjiang, LI Xiaobing, CHEN Jianfeng and XU Wenhu

China Surface Engineering ›› 2018, Vol. 31 ›› Issue (6) : 125-132.

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China Surface Engineering ›› 2018, Vol. 31 ›› Issue (6) : 125-132. DOI: 10.11933/j.issn.1007-9289.20180824002

Effects of Abrasive Particles and Pads’ Characteristics on Ultrasonic Assisted Chemical Mechanical Polishing for Sapphire

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 31(6): 125-132 https://doi.org/10.11933/j.issn.1007-9289.20180824002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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