Ultra-thick Multilayer Ti-doped DLC Films Deposited By Double Bend-tube Magnetic Filter Cathode Vacuum Arc Technology

doi:10.11933/j.issn.1007-9289.20171201002

JIANG Qi-li, WANG Hao-qi, ZHOU Han, PANG Pan, LIU Jian-wu and LIAO Bin

China Surface Engineering ›› 2018, Vol. 31 ›› Issue (3) : 53-60.

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China Surface Engineering ›› 2018, Vol. 31 ›› Issue (3) : 53-60. DOI: 10.11933/j.issn.1007-9289.20171201002

Ultra-thick Multilayer Ti-doped DLC Films Deposited By Double Bend-tube Magnetic Filter Cathode Vacuum Arc Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 31(3): 53-60 https://doi.org/10.11933/j.issn.1007-9289.20171201002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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