Effects of Hydrogen Flow Rate on Deposition of Large Area Diamond Films

doi:10.11933/j.issn.1007-9289.20171018002

SUN Qi, WANG Jian-hua, LIU Fan and WENG Jun

China Surface Engineering ›› 2018, Vol. 31 ›› Issue (2) : 75-84.

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China Surface Engineering ›› 2018, Vol. 31 ›› Issue (2) : 75-84. DOI: 10.11933/j.issn.1007-9289.20171018002

Effects of Hydrogen Flow Rate on Deposition of Large Area Diamond Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 31(2): 75-84 https://doi.org/10.11933/j.issn.1007-9289.20171018002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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