Effects of Single Layer Thickness of CNx on Microstructure and Mechanical Properties of DLC/CNx Multilayer Films

doi:10.11933/j.issn.1007-9289.20170823002

Effects of Single Layer Thickness of CN_x on Microstructure and Mechanical Properties of DLC/CN_x Multilayer Films

YANG Fang-er, CHANG Xin-xin, LIN Ling-ling, GONG Run-ze, ZHOU Xiao-feng and ZHENG Xiao-hua

China Surface Engineering ›› 2018, Vol. 31 ›› Issue (2) : 66-74.

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China Surface Engineering ›› 2018, Vol. 31 ›› Issue (2) : 66-74. DOI: 10.11933/j.issn.1007-9289.20170823002

Effects of Single Layer Thickness of CN_x on Microstructure and Mechanical Properties of DLC/CN_x Multilayer Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 31(2): 66-74 https://doi.org/10.11933/j.issn.1007-9289.20170823002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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