Effects of Sputtering Process on Interfacial Structure of CrAlN/TiAlN Nano-scale Multilayer by X-ray Reflectometry

doi:10.11933/j.issn.1007-9289.20170822002

DU Xiao-ming, ZHENG Kai-feng, WANG Yan, LI Xin-xi, ZHANG Gang and HUANG Chao-qiang

China Surface Engineering ›› 2018, Vol. 31 ›› Issue (1) : 67-73.

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China Surface Engineering ›› 2018, Vol. 31 ›› Issue (1) : 67-73. DOI: 10.11933/j.issn.1007-9289.20170822002

Effects of Sputtering Process on Interfacial Structure of CrAlN/TiAlN Nano-scale Multilayer by X-ray Reflectometry

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2018, 31(1): 67-73 https://doi.org/10.11933/j.issn.1007-9289.20170822002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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