Effects of Ion Source Cycle Bombardment on Structure and Electrical Properties of TiN Films Prepared by Magnetron Sputtering

doi:10.11933/j.issn.1007-9289.20160911002

SHAO Tao, SUN De-en, LIANG Fei-ke and HUANG Jia-mu

China Surface Engineering ›› 2017, Vol. 30 ›› Issue (1) : 77-82.

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China Surface Engineering ›› 2017, Vol. 30 ›› Issue (1) : 77-82. DOI: 10.11933/j.issn.1007-9289.20160911002

Effects of Ion Source Cycle Bombardment on Structure and Electrical Properties of TiN Films Prepared by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2017, 30(1): 77-82 https://doi.org/10.11933/j.issn.1007-9289.20160911002

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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