Tribological and Electrochemical Properties of Ti/TiN Multilayer Film Prepared by Multi-arc Ion Plating

doi:10.11933/j.issn.1007-9289.2016.03.003

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China Surface Engineering ›› 2016, Vol. 29 ›› Issue (3) : 20-25. DOI: 10.11933/j.issn.1007-9289.2016.03.003

SHI Xin, DAI Jian-feng, WU Gui-zhi, ZHANG Guang-an and CHEN Jian-min

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Multilayer films are of great significance to engineering field due to their excellent anti-wear properties and corrosion resistance. The TiN single film and three types of Ti/TiN multilayer films with different modulation ratio were deposited on 304 stainless steels and Si(100) wafers by multi-arc ion plating, respectively. The microstructure, wear-resistant and electrochemistry performances of the films were analyzed by XRD, SEM, CSM tribometer and electrochemical workstation. The results indicate that the multilayer films have obvious layered structure, and TiN phase exhibits a preferred orientation at (111) lattice plane. The sample of Ti and TiN deposition time ratio of 1:5 has the lowest coefficient of friction (0.25) and wear rate (6.6×10^-7 mm³·N^-1·m^-1). In 3.5% NaCl solution, the corrosion current densities of the multilayer films are two orders of magnitude lower than that of the substrate. Moreover, the corrosion potentials of the films positively shift than that of the substrate obviously. Therefore, the corrosion resistance of stainless steel can be improved by multilayer films.

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Ti/TiN multilayer films;multi-arc ion plating;wear rate;corrosion resistance

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SHI Xin, DAI Jian-feng, WU Gui-zhi, ZHANG Guang-an and CHEN Jian-min. Tribological and Electrochemical Properties of Ti/TiN Multilayer Film Prepared by Multi-arc Ion Plating[J]. China Surface Engineering, 2016, 29(3): 20-25 https://doi.org/10.11933/j.issn.1007-9289.2016.03.003

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2023-12-19

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