Tribological Properties of Al/AlN Multilayers Prepared by Magnetron Sputtering Technique

doi:10.11933/j.issn.1007-9289.2016.01.009

WANG Yunfeng, ZHANG Guangan, WU Zhiguo

China Surface Engineering ›› 2016, Vol. 29 ›› Issue (1) : 58-63.

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China Surface Engineering ›› 2016, Vol. 29 ›› Issue (1) : 58-63. DOI: 10.11933/j.issn.1007-9289.2016.01.009

Tribological Properties of Al/AlN Multilayers Prepared by Magnetron Sputtering Technique

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 29(1): 58-63 https://doi.org/10.11933/j.issn.1007-9289.2016.01.009

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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