A Structure Zone Diagram Including Plasma-based Deposition and Ion Etching

doi:10.11933/j.issn.1007-9289.2016.01.001

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China Surface Engineering ›› 2016, Vol. 29 ›› Issue (1) : 1-6. DOI: 10.11933/j.issn.1007-9289.2016.01.001

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2016, 29(1): 1-6 https://doi.org/10.11933/j.issn.1007-9289.2016.01.001

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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