Effects of Deposition Pressure on Structure and Properties of TiCN Films by Hybrid Ion Plating

doi:10.11933/j.issn.1007-9289.2015.05.004

WANG Yu, HUANG Meidong, LI Yunke, CHEN Zehao, ZHANG Chen, YANG Mingmin

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (5) : 24-29.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (5) : 24-29. DOI: 10.11933/j.issn.1007-9289.2015.05.004

Effects of Deposition Pressure on Structure and Properties of TiCN Films by Hybrid Ion Plating

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(5): 24-29 https://doi.org/10.11933/j.issn.1007-9289.2015.05.004

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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