Influence of Ionic Concentration of Slurry on Process of Chemical Mechanical Polishing

doi:10.11933/j.issn.1007-9289.2015.04.007

LIN Guangchuan, GUO Dan, XIE Guoxin, PAN Guoshun

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (4) : 54-61.

PDF(5954 KB)

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (4) : 54-61. DOI: 10.11933/j.issn.1007-9289.2015.04.007

Influence of Ionic Concentration of Slurry on Process of Chemical Mechanical Polishing

{{article.zuoZhe_EN}}

Author information +

History +

HeighLight

Abstract

Key words

QR code of this article

Cite this article

EndNote

Ris (Procite)

Bibtex

Download Citations

{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(4): 54-61 https://doi.org/10.11933/j.issn.1007-9289.2015.04.007

References

Publishing order | Descend order by publishing year | Descend order by cited within

References

Funding

RIGHTS & PERMISSIONS

PDF(5954 KB)

Accesses

Citation

Detail

Sections

Recommended

ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

Visited

Total visitors:　
Visitors of today: 　
Now online:

Please choose a citation manager

Content to export