Optimizing Process Parameters of Ultrasound Fine Atomization CMP on TFT-LCD Glass Substrate

doi:10.11933/j.issn.1007-9289.2015.02.014

MO Yidong, LI Qingzhong

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (2) : 121-125.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (2) : 121-125. DOI: 10.11933/j.issn.1007-9289.2015.02.014

Optimizing Process Parameters of Ultrasound Fine Atomization CMP on TFT-LCD Glass Substrate

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(2): 121-125 https://doi.org/10.11933/j.issn.1007-9289.2015.02.014

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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