Influences of Cycles Argon Ion Bombardment on Structure and Properties of Al Films Deposited by Magnetron Sputtering

doi:10.11933/j.issn.1007-9289.2015.01.008

HU Fang, DAI Mingjiang, LIN Songsheng, HOU Huijun, SHI Qian, ZHAO Li

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (1) : 49-55.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (1) : 49-55. DOI: 10.11933/j.issn.1007-9289.2015.01.008

Influences of Cycles Argon Ion Bombardment on Structure and Properties of Al Films Deposited by Magnetron Sputtering

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(1): 49-55 https://doi.org/10.11933/j.issn.1007-9289.2015.01.008

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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