Effects of Flow Ratio of H<sub>2</sub> and CH<sub>4</sub> on Structure and Friction Properties of Hydrogen Diamond-like Carbon Films

doi:10.11933/j.issn.1007-9289.2015.01.007

Effects of Flow Ratio of H₂ and CH₄ on Structure and Friction Properties of Hydrogen Diamond-like Carbon Films

WU Jinlong, ZHOU Hui, ZHENG Jun, YANG Lamaocao, ZHANG Yanshuai, HU Hanjun

China Surface Engineering ›› 2015, Vol. 28 ›› Issue (1) : 42-48.

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China Surface Engineering ›› 2015, Vol. 28 ›› Issue (1) : 42-48. DOI: 10.11933/j.issn.1007-9289.2015.01.007

Effects of Flow Ratio of H₂ and CH₄ on Structure and Friction Properties of Hydrogen Diamond-like Carbon Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2015, 28(1): 42-48 https://doi.org/10.11933/j.issn.1007-9289.2015.01.007

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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