Mechanical Properties and Thermal Stability of TiAlN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition Obtains New Progress

doi:10.11933/j.issn.1007-9289.2014.06.018

SHANG Hongfei

China Surface Engineering ›› 2014, Vol. 27 ›› Issue (6) : 141-141.

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China Surface Engineering ›› 2014, Vol. 27 ›› Issue (6) : 141-141. DOI: 10.11933/j.issn.1007-9289.2014.06.018

Mechanical Properties and Thermal Stability of TiAlN/Ta Multilayer Film Deposited by Ion Beam Assisted Deposition Obtains New Progress

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 27(6): 141-141 https://doi.org/10.11933/j.issn.1007-9289.2014.06.018

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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