Progress in Clusters Ion Beam with Nanoscale Manufacturing Technology

doi:10.11933/j.issn.1007-9289.2014.06.003

ZHANG Zaodi, LI Hui, WANG Zesong, FU Dejun

China Surface Engineering ›› 2014, Vol. 27 ›› Issue (6) : 28-43.

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China Surface Engineering ›› 2014, Vol. 27 ›› Issue (6) : 28-43. DOI: 10.11933/j.issn.1007-9289.2014.06.003

Progress in Clusters Ion Beam with Nanoscale Manufacturing Technology

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2014, 27(6): 28-43 https://doi.org/10.11933/j.issn.1007-9289.2014.06.003

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ISSN 1007-9289　CN 11-3905/TG
Supervised by: China Association for Science and Technology
Sponsored by: Chinese Mechanical Engineering Society
Edited and Published by: Editorial Office of China Surface Engineering

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