Effect of Methane Flow Rate on Microstructure and Tribological Properties of Boron Carbide-based Thin Films

ZHANG Xinyun, WANG Ning, JIANG Chengyan, WANG Peng, ZHAO Xiaoyu, PANG Xinru, CHAI Liqiang, GUO Junde

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (3) : 343-352.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (3) : 343-352. DOI: 10.11933/CSE2026183

Effect of Methane Flow Rate on Microstructure and Tribological Properties of Boron Carbide-based Thin Films

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(3): 343-352 https://doi.org/10.11933/CSE2026183

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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