Research Progress on Preparation of Diamond-like Carbon Films Using Physical Vapor Deposition

LIU Shuyang, TAO Guanyu, CHEN Hui, ZHANG Yu, DU Jianrong, ZENG Lu, WU Zhenyu

China Surface Engineering ›› 2026, Vol. 39 ›› Issue (3) : 20-49.

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China Surface Engineering ›› 2026, Vol. 39 ›› Issue (3) : 20-49. DOI: 10.11933/CSE2026072

Research Progress on Preparation of Diamond-like Carbon Films Using Physical Vapor Deposition

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{{article.zuoZheEn_L}}. {{article.title_en}}[J]. {{journal.qiKanMingCheng_EN}}, 2026, 39(3): 20-49 https://doi.org/10.11933/CSE2026072

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ISSN 1007-9289　CN 11-3905/TG
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Sponsored by: Chinese Mechanical Engineering Society
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