基体偏压对电弧离子镀AlCrSiON涂层结构和热稳定性的影响
耿东森,吴正涛,聂志伟,黎海旭,张小波,代伟,王启民
Influence of Substrate Bias on Microstructure and Thermal Stability of AlCrSiON Coatings Deposited by Arc Ion Plating
GENG Dong-sen, WU Zheng-tao, NIE Zhi-wei, LI Hai-xu, ZHANG Xiao-bo, DAI Wei and WANG Qi-min
中国表面工程
.
2016, (6): 60
-66
.
DOI: 10.11933/j.issn.1007-9289.2016.06.009
