金属铜辅助化学刻蚀对金刚线切割多晶硅的制绒
邹宇新,席风硕,邱佳佳,杨玺,李绍元,马文会
Cu-assisted Chemical Etching of Diamond Wire Sawn Multicrystalline Silicon Wafers for Texturing
ZOU Yu-xin, XI Feng-shuo, QIU Jia-jia, YANG Xi, LI Shao-yuan and MA Wen-hui
中国表面工程
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2017, (6): 59
-66
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DOI: 10.11933/j.issn.1007-9289.20170427002
