靶基距对Cu/Si(100)薄膜结构和残余应力的影响
孟笛，蒋智韬，李玉阁，高剑英，雷明凯
Effects of Target-substrate Distance on Structure and Residual Stress of Cu / Si(100) Thin Films
Meng Di, Jiang Zhitao, Li Yuge, Gao Jianying, Lei Mingkai
中国表面工程
.
2020, (6): 86
-92
.
DOI: 10.11933/j.issn.1007-9289.20190910002
