多晶硬脆材料超精密抛光研究现状与趋势
陈泓谕, 陈溢阳, 杨宇杰, 齐欢, 吕冰海
Research Status and Trend of Ultra-precision Polishing of Polycrystalline Hard and Brittle Materials
CHEN Hongyu, CHEN Yiyang, YANG Yujie, QI Huan, LÜ Binghai
中国表面工程
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2026, (2): 294
-309
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DOI: 10.11933/CSE2026309
