超声辅助光催化抛光单晶碳化硅去除机理研究
田壮智, 班新星, 巴文兰, 朱建辉, 王宁昌, 惠珍, 栗正新
Removal Mechanism of Single-crystal Silicon Carbide by Ultrasonic-assisted Photocatalytic Polishing
TIAN Zhuangzhi, BAN Xinxing, BA Wenlan, ZHU Jianhui, WANG Ningchang, HUI Zhen, LI Zhengxin
中国表面工程
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2025, (5): 171
-181
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DOI: 10.11933/j.issn.1007-9289.20250122001
