飞秒激光制备梯度润湿性单晶硅表面∗
杨奇彪,卞若男,王杰,周维,刘顿
Gradient Wettability of Monocrystalline Silicon Surface Prepared by Femtosecond Laser
YANG Qibiao, BIAN Ruonan, WANG Jie, ZHOU Wei, LIU Dun
中国表面工程 . 2021, (6): 175 -180 .  DOI: 10.11933/j.issn.1007-9289.20210506001