基体对氮化钛膜的微力学和摩擦性能的影响
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Effects of Different Substrates on Micromechanical and Tribology Properties of TiN Films
ZHANG Tai-hua1,LIU Dong-xu1,HUAN Yong1,WANG Xiu-lan2
中国表面工程 . 2003, (4): 23 -26 .