HiPIMS电源的设计基础及研究进展
巩春志,吴厚朴,胡天时,田修波
Design Basis and Research Progress of HiPIMS Power Supply
GONG Chunzhi, WU Houpu, HU Tianshi, TIAN Xiubo
中国表面工程 . 2022, (5): 1 -9 .  DOI: 10.11933/j.issn.1007-9289.20220228001