基于高功率脉冲磁控溅射的Cr膜层研究进展
丁啸云，张津，田修波，吴忠振，连勇
Research Progress of Cr Coating Based on High Power Impulse Magnetron Sputtering
DING Xiaoyun, ZHANG Jin, TIAN Xiubo, WU Zhongzhen, LIAN Yong
中国表面工程
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2022, (5): 56
-69
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DOI: 10.11933/j.issn.1007-9289.20211230003
