高功率脉冲磁控溅射管内壁沉积Cr薄膜结构及性能
吴厚朴，田修波，郑林林，巩春志，张辉
Structure and Properties of Cr Films Deposited by High Power Impulse Magnetron Sputtering on Inner Surface of Tube
WU Houpu, TIAN Xiubo, ZHENG Linlin, GONG Chunzhi, ZHANG Hui
中国表面工程
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2022, (5): 210
-216
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DOI: 10.11933/j.issn.1007-9289.20211208002
