高功率脉冲磁控溅射制备纳米复合高熵碳化物(CuNiTiNbCr)Cx薄膜
李延涛，经佩佩，曾小康，刘茂，姜欣，冷永祥
(CuNiTiNbCr)Cx Nanocomposite High Entropy Carbide Film Prepared by High Power Pulsed Magnetron Sputtering
LI Yantao, JING Peipei, ZENG Xiaokang, LIU Mao, JIANG Xin, LENG Yongxiang
中国表面工程
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2022, (5): 217
-227
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DOI: 10.11933/j.issn.1007-9289.20211216001
