磁控溅射Al-Ti合金薄膜的结构与性能变化
聂霞， 冒守栋， 晏敏胜， 郑必长， 李金龙， 宋振纶
Structure and Properties Variation of Al-Ti Alloy Coatings Prepared by Magnetron Sputtering
NIE Xia, MAO Shoudong, YAN Minsheng, ZHENG Bizhang, LI Jinlong, SONG Zhenlun
中国表面工程
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2014, (4): 95
-99
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DOI: 10.3969/j.issn.1007-9289.2014.04.015
