循环氩离子轰击对磁控溅射铝膜结构和性能的影响
胡芳， 代明江， 林松盛， 侯惠君， 石倩， 赵利
Influences of Cycles Argon Ion Bombardment on Structure and Properties of Al Films Deposited by Magnetron Sputtering
HU Fang, DAI Mingjiang, LIN Songsheng, HOU Huijun, SHI Qian, ZHAO Li
中国表面工程
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2015, (1): 49
-55
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DOI: 10.11933/j.issn.1007-9289.2015.01.008
