采用中频非平衡磁控溅射技术制备CrAl/CrAlN多层薄膜，研究了调制周期对CrAl/CrAlN 多层薄膜的微观结构、机械性能和耐腐蚀性能的影响。研究表明：CrAl/CrAlN多层薄膜具有致密的层状结构。随着调制周期的增大，薄膜应力由拉应力转变为压应力，当调制周期为285.7 nm时，CrAl/CrAlN多层薄膜的硬度出现了极大值。此外，调制周期对薄膜的耐腐蚀性能有显著的影响。经过96 h 盐雾（3.5%NaCl）试验，调制周期为142.8 nm的CrAl/CrAlN多层薄膜依然没有发生腐蚀现象，表明此条件下CrAl/CrAlN薄膜具有优异的耐腐蚀性能。

CrAl/CrAlN multilayer films were deposited by midfrequency unbalanced magnetron sputtering. The structure, mechanical features and corrosion resistance as a function of modulation periodicity of the films were also studied. The results show that all of the CrAl/CrAlN multilayer films have denser layered structure. The internal stress of the CrAl/CrAlN multilayer films becomes the compressive stress as the modulation periodicity increases, and the hardness of the films attains a maximum value when the modulation periodicity is 285.7 nm. Moreover，the modulation periodicity has a great effect on the corrosion resistance of the CrAl/CrAlN multilayer films. After 96 h salt spray corrosion test (3.5% NaCl), the CrAl/CrAlN multilayer films at the modulation periodicity of 142.8 nm are not corrosive at all, which show that the films have excellent corrosion resistance.