为了研究Ti和Cr元素在Cr2O3薄膜中的扩散行为及其对摩擦学性能的影响，对Cr2O3薄膜在1 000℃大气环境下进行不同保温时间的退火处理。利用扫描电子显微镜、三维轮廓仪、X射线衍射仪以及透射电镜对薄膜的表面形貌、成分以及结构进行分析，采用球盘式摩擦磨损试验机对Cr2O3薄膜的摩擦学性能进行研究。结果表明：在1 000℃下Inconel 718基材中的Ti和Cr会沿着Cr2O3薄膜的晶界扩散至薄膜表面，与大气中的氧反应生成由Cr2O3和Cr2Ti7O17组成的复合相，并在薄膜表面晶界处堆积形成类网状凸起结构。随着保温时间的增加，这种类网状凸起结构的高度也越大。该结构可以显著降低薄膜的摩擦因数以及磨损率。当保温时间只有1 min时，薄膜的平均摩擦因数为0.35，磨损率为5.7 μm3/Nm。而当保温时间达到240 min时，薄膜的摩擦因数降至0.24，磨损率降至3.2 μm3/Nm。
Abstract
In order to study the diffusion behavior of Ti and Cr elements in Cr2O3 film and its effects on the tribological properties, Cr2O3 films were annealed at 1 000℃ in air with different holding time. The surface morphology, composition and structure of the Cr2O3 films after being annealed at 1 000℃ with different holding time were analyzed by SEM, 3D surface mapping profiler, XRD and TEM. The tribological properties of the annealed films were conducted on a ball-on-disc tribometer. The results show that Ti and Cr atoms from Inconel 718 substrate can diffuse along the grain boundaries of the Cr2O3 film to film surface, then react with oxygen and form the mesh-like heave structure that is composed of Cr2O3 and Cr2Ti7O17 phases. The height of the mesh-like heave structure increases with increasing holding time. Moreover, the mesh-like heave structure can evidently reduce the friction coefficient and wear rate of the Cr2O3 film. After being annealed with the holding time of 1 min, the average friction coefficient and wear rate are 0.35 and 5.7 μm3/Nm, respectively. When the holding time reaches 240 min, the average friction coefficient and wear rate decrease to 0.24 and 3.2 μm3/Nm, respectively.
关键词
Cr2O3薄膜;元素扩散;类网状凸起结构;摩擦与磨损
{{custom_keyword}} /
Key words
Cr2O3 film;elements diffusion;mesh-like heave structure;friction and wear
{{custom_keyword}} /
{{custom_sec.title}}
{{custom_sec.title}}
{{custom_sec.content}}
参考文献
[1] 毛杰, 邓畅, 邓春明, 等. 基于孔隙率的Cr2O3涂层工艺优化及回归分析[J]. 中国表面工程, 2013, 24(4):38-43. MAO J, DENG C, DENG C M, et al. Process optimization and regression analysis of Cr2O3 coating based on porosity[J]. China Surface Engineering, 2013, 24(4):38-43(in Chinese).
[2] 谢涛, 王杰, 段可, 等. 化学气相沉积法制备Cr2O3涂层及其性能研究[J]. 热加工工艺, 2015, 44(4):178-180. XIE T, WANG J, DUAN K, et al. Study on preparation and properties of Cr2O3 ceramic coating by chemical vapor deposition[J]. Hot Working Technology, 2015, 44(4):178-180(in Chinese).
[3] SOURTY E, SULLIVAN J L, BIJKER M D. Chromium oxide coatings applied to magnetic tape heads for improved wear resistance[J]. Tribology International, 2003, 36(4/5/6):389-396.
[4] CETINEL H, CELIKB E, KUSOGLU M I. Tribological behavior of Cr2O3 coatings as bearing materials[J]. Journal of Materials Processing Technology, 2008, 196(1/2/3):259-265.
[5] HO W Y, HUANG D H, HUANG L T, et al. Study of characteristics of Cr2O3/CrN duplex coatings for aluminum die casting applications[J]. Surface & Coatings Technology, 2004, 177-178:172-177.
[6] PANG X L, GAO K W, LUO F, et al. Annealing effects on microstructure and mechanical properties of chromium oxide coatings[J]. Thin Solid Films, 2008, 516(15):4685-4689.
[7] HE N R, LI H X, JI L, et al. Toughness measurement and toughening mechanisms of arc ion plating Cr2O3 films treated by annealing[J]. Ceramic International, 2015, 41(8):9534-9541.
[8] HE N R, LI H X, JI L, et al. Role of annealing temperatures on the evolution of microstructure and properties of Cr2O3 films[J]. Applied Surface Science, 2015, 357:1472-1480.
[9] CHEN J H, ROGERS P M, LITTLE J A. Oxidation behavior of several chromia-forming commercial nickel-base superalloys[J]. Oxidation of Metals, 1997, 47(5):381-410.
[10] 赵双群, 董建新, 张麦仓, 等. 新型镍基高温合金在950℃和1000℃的氧化行为[J]. 稀有金属材料与工程, 2005, 34(2):208-211. ZHAO S Q, DONG J X, ZHANG M C, et al. Oxidation behaviors of new Ni-based superalloy at 950℃ and 1000℃[J]. Rare Metal Materials and Engineering, 2005, 34(2):208-211(in Chinese).
[11] HU T C, HU L T. Tribological properties of lubricating films on the Al-Si alloy surface via laser surface texturing[J]. Tribology Transactions, 2011, 54(5):800-805.
[12] ANDERSSON S, SUNDHOLM A, MAGNÉLI A. A homologous series of mixed titanium chromium oxides Ti(n-2)-Cr2O(2n-1) isomorphous with the series Ti(n)O(2n-1) and V(n)O(2n-1)[J]. Acta Chemica Scandinavica, 1959, 13(5):989-997.
{{custom_fnGroup.title_cn}}
脚注
{{custom_fn.content}}
基金
国家重点基础研究发展计划（973计划）（2013CB632302）；国家自然科学基金（51505461）
{{custom_fund}}
PDF(9347 KB)
