| 摘要: |
| TiSiCN 硬质纳米复合涂层因其优异的力学性能和摩擦学性能而被广泛应用于各类机械零部件表面的防护涂层,但是超硬耐磨 TiSiCN 纳米复合涂层的可控制备技术仍然有待进一步研究。 采用高功率脉冲磁控溅射技术,微脉冲振荡开启时间 ＜i＞τ＜/i＞on = 50 μs,平均靶功率 4~ 8 kW,在 AISI 316L 不锈钢和 Si(100)单晶硅表面沉积了一系列不同成分的 TiSiCN 纳米复合涂层。 通过 XRD、FESEM、TEM、Raman 表征了涂层的结构和成分,采用纳米压痕仪和显微硬度计表征涂层的硬度和断裂韧性 KIC 。 通过摩擦磨损试验机表征了涂层在不同介质环境下的摩擦学性能,利用表面轮廓仪和光学显微镜对磨痕形貌进行进一步分析。 分析结果表明 TiSiCN 涂层由非晶包覆晶粒尺寸为 4 ~ 11 nm 的 TiCN 纳米晶构成。 随着靶功率的增加,涂层的硬度从 32. 6 GPa 增至 41. 3 GPa,膜-基结合力等级均为 HF2~ HF1。 8 kW 制备的 TiSiCN 涂层在干摩擦、酸、碱、油溶液环境下的磨损率分别为 5. 9×10 -6 mm 3N -1m -1 、4. 3×10 -5 mm 3N -1m -1 、9. 1×10 -5 mm 3N -1m -1 和 1. 28×10 -9 mm 3N -1m -1 。 研究成果表明采用高功率脉冲磁控溅射技术制备的 TiSiCN 纳米复合涂层在酸、碱、油溶液环境下均具有优异的耐摩擦学性能,在各类腐蚀环境中具有优异的应用前景。 |
| 关键词: 高功率脉冲磁控溅射 TiSiCN 纳米复合涂层 摩擦学性能 |
| DOI：10.11933/j.issn.1007-9289.20210705001 |
| 分类号:TG156;TB114 |
| 基金项目: |
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| Tribological Properties of Superhard TiSiCN Nanocomposite Coating in Multiple Environments |
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LI Yongsheng1,2, CHEN Yunbo1, LU Xiaogang1, ZUO Lingli1, OU Yixiang1, WANG Haoqi1, PAN Peng1, SUN Chuan1, ZHANG Baoyan2, CHEN Ru2
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1.Beijing National Innovation Institute of Lightweight Ltd, Beijing 100083 , China;2.Shandong Tianrui Heavy Industry Co.Ltd, Weifang 261061 , China
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| Abstract: |
| Hard TiSiCN nanocomposite coatings are widely used as protective coatings deposited on various mechanical components due to their excellent mechanical and tribological properties. However, the controllable preparation of superhard TiSiCN nanocomposite coatings is still needed to be further studied. Herein, TiSiCN nanocomposite coatings are deposited on AISI 316L stainless steel and Si(100) by high power impulse magnetron sputtering with the micro-pulse oscillation time of 50 μs and average target power of 4 ~ 8 kW. The structure and chemical composition of TiSiCN coatings are characterized by XRD, FESEM, TEM and Raman. The hardness, fracture toughness and tribological behaviors are studied by nanoindentation tester, microhardness tester, wear tester, surface profiler and optical microscope, respectively. TiSiCN coatings consist of amorphous coated TiCN nanocrystals with grain size of 4-11 nm. The hardness of TiSiCN coatings increase from 32. 6 to 41. 3 GPa with the average target power increasing from 4 to 8 kW, meanwhile the coatings show excellent adhesion of above HF2. The specific wear rates of TiSiCN coatings deposited at 8 kW in dry friction, acid, alkali and oil solution are 5. 9×10 -6mm 3N -1m -1 , 4. 3×10 -5 mm 3N -1m -1 , 9. 1×10 -5 mm 3N -1m -1 and 1. 28×10 -9 mm 3N -1m -1 , respectively. Research results show that TiSiCN nanocomposite coatings prepared by high power impulse magnetron sputtering have excellent tribological properties in acid, alkali and oil solutions, which exhibit promising applications in various corrosive environments. |
| Key words: high power impulse magnetron sputtering TiSiCN nanocomposite coating tribological properties |
