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电射流法沉积的ZrO2织构化表面及其摩擦磨损特性∗
张志慧, 邓建新, 王冉, 李学木, 葛栋梁, 吴佳星
山东大学机械工程学院 济南 250061
摘要:
精密器械中的微摩擦零件的增摩需求逐渐被重视,电射流沉积法可以低成本制备出增摩表面。 利用溶胶凝胶法制作 ZrO2 溶液,通过电射流沉积技术结合掩膜板在 316L 不锈钢表面制备具有仿生图案的二氧化锆(ZrO2 )织构化表面,测试织构化表面的亲水性和不同加载力下的摩擦磨损性能,并与相同试验条件下的光滑基体、薄膜作对比。 结果表明:利用电射流沉积技术通过掩膜板制备织构化增摩表面的方法简单可行,织构化表面与基体和薄膜相比亲水性更弱,与光滑基体相比在小加载力下其摩擦因数增加约 70%,磨损率下降约 50%,有明显的增摩、耐磨效果。 电射流法借助掩膜板沉积的 ZrO2 织构化表面可为微摩擦零件表面的增摩耐磨提供一种新方式。
关键词:  ZrO2 表面膜层  电射流沉积  增摩  微织构  掩膜板
DOI:10.11933/j.issn.1007-9289.20210721001
分类号:TG174;TH140
基金项目:山东省重点研发计划资助项目(2019TSLH0315)
Preparation and Tribological Properties of ZrO2 Micro-texture Surface Fabricated by Electrohydrodynamic Atomization
ZHANG Zhihui, DENG Jianxin, WANG Ran, LI Xuemu, GE Dongliang, WU Jiaxing
Institute of Mechanical Engineering, Shandong University, Jinan 250061 , China
Abstract:
The increasing demand of micro-friction parts in the precision machining is gradually valued, and it can be satisfied by electrohydrodynamic atomization. A zirconium dioxide (ZrO2 ) film with a bionic micro-texture pattern is prepared on the surface of 316L stainless steel by electrohydrodynamic atomization with a mask. The ZrO2 solution is prepared by sol-gel method. Then the hydrophilicity and tribological property of ZrO2 micro-texture surface are evaluated. The results are compared with the smooth substrate and the ZrO2 films which has the same number of layers under the same test conditions. It is identified that the method using the electrohydrodynamic jet deposition to prepare the ZrO2 micro-texture surface with the mask is simple and feasible. And the prepared ZrO2 micro-texture surface shows its weak hydrophilicity. Compared with the smooth substrate, the micro-texture surface has remarkable friction-increasing effects. The friction coefficient increases by ~ 70%, and the wear rate decreases by ~ 50% under small loading. Thus, the ZrO2 micro-texture surface made by electrohydrodynamic atomization with mask is a new way to be used as a friction-increasing surface of the micro-friction parts.
Key words:  ZrO2 surface film  electrohydrodynamic atomization  friction-increasing  micro-texture  mask