| 摘要: |
| 选用金属Mo作为红外反射层，Mo-Al2O3作为吸收层，Al2O3作为减反射层，利用磁控溅射镀膜技术，在抛光的316L不锈钢片上制备具有双吸收层的Mo/Mo-Al2O3/Al2O3太阳能选择吸收膜系，研究减反射层和高、低金属吸收层的厚度及其金属体积分数对膜系选择吸收性能的影响。结果表明，当减反层厚度为50 nm时，所得膜系的选择吸收性能最佳。高金属吸收层厚度的增加会使薄膜反射率的骤升阈值发生红移，薄膜的发射率升高，但其厚度过高，则会影响薄膜的干涉效应。低金属吸收层厚度的增加会导致可见光波段的吸收率增加，红外波段的发射率上升，薄膜反射率的骤升阈值红移。高金属吸收层中金属体积分数增加会导致它的方块电阻降低，使薄膜的红外发射率下降。低金属吸收层中金属体积分数的增加，会导致薄膜的红外干涉下降，使其发射率升高，获得薄膜的最佳吸收率为0.922，发射率为0.029。 |
| 关键词: 选择吸收涂层 Mo-Al2O3 吸收率 反射率 磁控溅射 |
| DOI：10.11933/j.issn.1007-9289.20180306001 |
| 分类号:TG174.444;TB34 |
| 基金项目:国家自然科学基金（51101080） |
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| Preparation and Optical Properties of Mo-Al2O3 Solar Selective Absorbing Coatings |
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ZHANG Wen-hui, ZHANG Min, LI Ying, YIN Xue, LI Mei-yi, LI Xiao-jing
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School of Physics and Electronic Technology, Liaoning Normal University, Dalian 116029, Liaoning
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| Abstract: |
| Selecting metal Mo used as the infrared reflective layer, Mo-Al2O3 as the absorbing layer and Al2O3 as the antireflective layer, Mo/Mo-Al2O3/Al2O3 selective absorbing coatings with double absorption layer were fabricated on polished 316L stainless steel using magnetron sputtering, and the influence of the volume fraction of Mo, the thickness of antireflective layer and absorbing layer on the optical property were studied, respectively. Results show that the thickness of the antireflective layer affects the absorption edge and the absorption peak location. When the thickness of antireflective layer is 50 nm, the absorption performance of the film systems is the best. With increasing thickness of the high metal absorbing layer, the threshold wavelength of the reflectance shifts to wards red, and the emittance also increases. However, if the thickness is too high, it affects the film interference effect. With increasing thickness of the high metal absorbing layer, the visible absorption rate increases and the threshold wavelength of the reflectance shifts towards red, but the emittance gradually increases. With increasing metal content of the high metal absorbing layer, its square resistance is reduced. As a result, the emittance gradually declines. With increasing metal content of the low metal absorbing layer, the absorption of long wave spectrum increases, resulting in a decline in the infrared interference of the film, and thus its emittance rises. The optimized coating exhibits an absorptance of 0.922 and an emittance of 0.029. |
| Key words: selective absorbing coating molybdenum-aluminium oxide (Mo-Al2O3) absorptance reflectance magnetron sputtering |
