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不同过渡层对DLC薄膜力学性能和摩擦学性能的影响
卓国海,柯培玲,李晓伟,汪爱英,赵运才1,2
1. 江西理工大学 机电工程学院;2. 中国科学院宁波材料技术与工程研究所
摘要:
薄膜与基体间的界面结合性能是决定薄膜性能发挥的关键要素。针对类金刚石薄膜(DLC)在硬质合金上结合力差的问题,采用线性阳极离子束复合磁控溅射技术在硬质合金YG8基体上设计制备了单层W过渡层、WC过渡层、双层W过渡层和三层W过渡层4种不同W过渡层的DLC薄膜,探讨了不同过渡层对DLC薄膜力学和摩擦学性能的影响。结果表明:不同过渡层结构的DLC薄膜结构致密,界面柱状生长随着层数增加及过渡层厚度的降低而打断,有利于改善薄膜的韧性。当为三层W过渡层时,DLC薄膜的断裂韧性达到最大值6.44 MPa·m1/2;与单层W过渡层相比,薄膜硬度有小幅下降,但薄膜内应力降低了55%,且膜/基匹配性更佳,结合强度高达85 N,此时薄膜具有较低的摩擦因数和磨损率,表现出比较优异的抗磨减摩性能。
关键词:  类金刚石  过渡层  力学性能  摩擦性能
DOI:10.11933/j.issn.1007-9289.2015.06.006
分类号:
基金项目:
Influences of Different Interlayers on Mechanical and Tribological Properties of DLC Films
ZHUO Guohai, KE Peiling, LI Xiaowei, WANG Aiying, ZHAO Yuncai1,2
1. Department of Mechanical Engineering, Jiangxi University of Science and Technology;2.Ningbo Institute of Materials Technology and Engineering, Chinese Academy of Sciences
Abstract:
Adhesion between the film and the substrate is a key factor to determine the performance of the films. Due to the low adhesion of diamondlike carbon (DLC) film on cemented carbide, the DLC films with different W interlayer (single W layer, single WC layer, W bilayer, and W trilayer) were deposited on cemented carbide YG8 substrate by a novel linear ion beam source composited with a DC magnetron sputtering process. The mechanical and tribological properties of DLC films were evaluated. The results show that the DLC films with different W interlayers are dense, and the interfacial columnar structure with the increased layers is interrupted, which is conducive to improve the toughness of DLC films. For the DLC film with W trilayer, its the biggest toughness is 6.44 MPa·m1/2. The hardness decreases, howerver, the residual stress can be reduced by 55% compared to the film with single W layer and the adhesion strength reaches to 85 N. Additionally, this film has lower friction coefficient and wear rate, which exhibits excellent antiwear and antifriction properties.
Key words:  diamond likecarbon (DLC)  interlayer  mechanical properties  tribological performance