| 摘要: |
| 以环戊二烯为碳源，采用等离子体增强化学气相沉积法（PECVD）在Si单晶〈n100〉面上制备了类金刚石薄膜。采用FEI Tecnai F30型高分辨透射电镜（HRTEM）和LAMRAM HR 800型拉曼光谱仪对薄膜及磨屑的结构进行表征；利用MFTR4000摩擦磨损试验机、Hysitron Ti950型原位纳米力学测试系统考察薄膜的摩擦学及力学性能。结果表明： 所制备的金刚石薄膜具有富勒烯纳米团簇/非晶复合纳米结构，在磨屑中也出现了这种稳定的片层结构从而起到了良好的减摩作用；并且薄膜表现出优异的力学性能和摩擦学性能： 其硬度为26.8 GPa、弹性回复为85%、摩擦因数为0.01。由于这种特殊纳米结构的存在，使得薄膜的力学性能及摩擦学性能显著提高。 |
| 关键词: 环戊二烯 碳基薄膜 力学性能 摩擦学性能 |
| DOI：10.3969/j.issn.1007-9289.2014.04.014 |
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| Structure and Mechanical Behavior of Fullerene-like Carbon Films Using Cyclopentadiene as Carbon Source |
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ZHANG Qingtang, WU Kunyao, GONG Zhenbin, ZHANG Bin, ZHANG Junyan1,2
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1. School of Petrochemical Engineering, Lanzhou University of Technology, Lanzhou 730050;2. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000
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| Abstract: |
| Carbon films were synthesized by plasma enhanced chemical vapor deposition technique on silicon 〈n100〉 substrate using cyclopentadiene as the carbon source. The microstructure of the films and wear debris were characterized by high resolution transmission electron microscopy (HRTEM Tecnai F30) and Raman spectra（LABRAM HR 800）. The tribological and mechanical behaviors were investigated by frictionabrasion testing machine (FMTR4000) and nanoindentation (Hysitron Ti950). The results show that the films have fullerenelike clusters/amorphous composite nanostructure， and the stable lamellar nanostructures also appear in wear debris and have the good antifriction effect. The films also show excellent mechanical properties and tribological performance. The hardness of the films is 26.8 GPa, elastic recovery is 85%, and the friction coefficient is 0.01. Because of the existence of these special nanostructures, the films′ mechanical and tribological properties are significantly improved. |
| Key words: cyclopentadiene carbonbased film mechanical property tribological property |
