| 摘要: |
| 采用中频非平衡磁控溅射技术制备CrAl/CrAlN多层薄膜，研究了调制周期对CrAl/CrAlN 多层薄膜的微观结构、机械性能和耐腐蚀性能的影响。研究表明：CrAl/CrAlN多层薄膜具有致密的层状结构。随着调制周期的增大，薄膜应力由拉应力转变为压应力，当调制周期为285.7 nm时，CrAl/CrAlN多层薄膜的硬度出现了极大值。此外，调制周期对薄膜的耐腐蚀性能有显著的影响。经过96 h 盐雾（3.5%NaCl）试验，调制周期为142.8 nm的CrAl/CrAlN多层薄膜依然没有发生腐蚀现象，表明此条件下CrAl/CrAlN薄膜具有优异的耐腐蚀性能。 |
| 关键词: 磁控溅射 CrAl/CrAlN 多层薄膜 微观结构 耐腐蚀性能 |
| DOI：10.3969/j.issn.1007-9289.2013.05.004 |
| 分类号: |
| 基金项目: |
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| Influence of Modulation Periodicities on Structure and Corrosion Properties of CrAl/CrAlN Multilayer Films |
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LV Yanhong, JI Li, LIU Liu, LI Hongxuan, LIU Xiaohong, CHEN Jianmin, ZHOU Huidi1,2,3
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1.State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2.University of Chinese Academy of Sciences, Beijing 100049;3.College of Lifescience and Chemistry, Tianshui Normal University, Tianshui 741001, Gansu
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| Abstract: |
| CrAl/CrAlN multilayer films were deposited by midfrequency unbalanced magnetron sputtering. The structure, mechanical features and corrosion resistance as a function of modulation periodicity of the films were also studied. The results show that all of the CrAl/CrAlN multilayer films have denser layered structure. The internal stress of the CrAl/CrAlN multilayer films becomes the compressive stress as the modulation periodicity increases, and the hardness of the films attains a maximum value when the modulation periodicity is 285.7 nm. Moreover，the modulation periodicity has a great effect on the corrosion resistance of the CrAl/CrAlN multilayer films. After 96 h salt spray corrosion test (3.5% NaCl), the CrAl/CrAlN multilayer films at the modulation periodicity of 142.8 nm are not corrosive at all, which show that the films have excellent corrosion resistance. |
| Key words: magnetron sputtering CrAl/CrAlN multilayer films microstructure corrosion resistance |
