| 摘要: |
| 采用磁控溅射技术在YG8硬质合金基体上分别沉积了ZrAlYN涂层和ZrAlN涂层，利用X射线衍射仪、扫描电子显微镜以及原子力显微镜研究了Y元素的添加对ZrAlN涂层微观结构、断口和表面形貌的影响，同时对ZrAlYN和ZrAlN涂层的热稳定性和抗高温氧化性能进行了研究；采用纳米压痕技术对ZrAlYN和ZrAlN涂层的力学性能进行了比较。结果表明：Y元素的添加使ZrAlN涂层的微观结构发生了明显变化，从原来的（111）和（200）共同择优取向转变为（200）占主导；ZrAlYN和ZrAlN涂层的断口都呈非柱状结构，且ZrAlYN涂层的表面粗糙度小于ZrAlN涂层的；相比ZrAlN涂层，Y元素的加入使ZrAlYN涂层的热稳定性和抗高温氧化性有显著提高；硬度略有提高，而弹性模量降低，因此硬模比高于ZrAlN涂层，这表明ZrAlYN涂层具有更好的抵抗塑性变形的能力。 |
| 关键词: ZrAlYN 抗塑性变形 抗氧化性 硬度 |
| DOI：10.3969/j.issn.1007-9289.2013.05.003 |
| 分类号: |
| 基金项目: |
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| Structure and Properties of ZrAlYN Coating Deposited by Magnetron Sputtering |
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XIAN Guang, ZHAO Haibo, FAN Hongyuan, WANG Hui, DU Hao
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a. School of Manufacture Science and Engineering, b. The Center of Analysis and Testing, Sichuan University, Chengdu 610065
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| Abstract: |
| The ZrAlYN and ZrAlN coatings were deposited on YG8 cemented carbide substrate by magnetron sputtering. The X ray diffraction technique(XRD), scanning electron microscopy(SEM), and atomic force microscopy(AFM) were used to explore the effect of Y addition on the microstructure, cross sectional morphologies and surface morphologies of ZrAlN coating. Meanwhile, the thermal stability and oxidation resistance of ZrAlYN and ZrAlN coatings to high temperature had also been studied. Additionally, the mechanical properties of ZrAlYN and ZrAlN coatings were measured by nanoindentation technique. The results show that the microstructure of ZrAlN coating is apparently affects by Y element addition. The preferred orientation of ZrAlYN coating is changed to (200), while the ZrAlN coating is (111) and (200) jointly predominant. Both ZrAlYN and ZrAlN coatings are exhibited noncolumnar structure; the surface roughness of ZrAlYN is smaller than that of ZrAlN coating. Compared with ZrAlN coating, the thermal stability and oxidation resistance of ZrAlYN coating to high temperature is dramatically enhanced, and the hardness slightly increases, while the elastic modulus decreases for Y element. Thus, the H3/E2 of ZrAlYN coating increases and is greater than that of ZrAlN coating, which indicate better plastic deformation resistance of ZrAlYN coating than ZrAlN coating. |
| Key words: ZrAlYN plastic deformation resistance oxidation resistance hardness |
