| 摘要: |
| 采用中频非平衡反应磁控溅射技术在单晶硅P(111)和不锈钢（1Cr18Mn8Ni5N）基材上制备了CrN和CrAlN 薄膜。利用X射线衍射仪（XRD）、X射线光电子能谱仪（XPS）、原子力显微镜（AFM）、场发射扫描电子显微镜（FESEM）和纳米压痕仪对薄膜的相结构、化学组成、表面形貌、断面结构和力学性能进行了测试分析。利用球-盘式摩擦磨损试验机（CSM）考察了两种薄膜在不同介质（空气、自来水、oil-1(TAO-40)及oil-2(150BS)）中和Al2O3球对磨的摩擦学性能。结果表明：CrN薄膜中Al元素的掺杂并未改变薄膜晶体结构，但却降低了薄膜的表面粗糙度、增强了薄膜的致密性、提高了薄膜的力学性能、改善了水润滑和油润滑条件下薄膜的摩擦学性能。由于CrN和CrAlN薄膜的摩擦磨损性能显著依赖于测试介质，因此重点讨论了它们在不同介质中的摩擦磨损机理。 |
| 关键词: 磁控溅射 CrN薄膜 CrAlN薄膜 摩擦磨损 |
| DOI： |
| 分类号: |
| 基金项目:国家自然科学基金（51175491）; 中国科学院创新群体基金（50421502） |
|
| Microstructure and Tribological Properties of CrN and CrAlN Films Under Different Contact Conditions |
|
FU Ying–ying, LI Hong–xuan, JI Li, LIU Xiao–hong, ZHOU Hui–di, CHEN Jian–min1,2
|
|
1. State Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou 730000;2. Graduate University of the Chinese Academy of Sciences, Beijing 100049
|
| Abstract: |
| CrN and CrAlN films were deposited on silicon and stainless steel substrates by middle frequency unbalanced reactive magnetron sputtering. The crystal construction, chemical composition, surface morphologies, crosssectional structure and mechanical properties of the resultant films were studied by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), atomic force microscope (AFM), field emission scanning electron microscopy (FESEM) and nanoindentation instrument, respectively. The tribological properties of the studied films under different contact conditions (air, running water, oil1(TAO40) and oil2 (150BS)) sliding against Al2O3 balls were investigated by ballondisk tribometer (CSM). The results show that the doping of CrN film with Al element does not change its crystal construction, however decreases its surface roughness, enhances its compactness, and improves its mechanical properties and tribological behaviors under water and oillubricated conditions. As the tribological properties of the CrN and CrAlN films are strongly dependent on contact conditions, special attention is being paid to the friction and wear mechanisms of the films under different test environments. |
| Key words: magnetron sputtering CrN film CrAlN film friction and wear |
