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| 摘要: |
| 利用X射线衍射技术（XRD）分析了薄膜结合界面应力及其变化规律，通过对薄膜界面结合状态的检测，建立了X衍射法测量薄膜界面结合强度的原理、方法与过程。其检测界面结合强度方法可对薄膜试样进行非接触检测，适用于晶体或多晶体薄膜的界面结合强度测量，是一种研究无损检测薄膜结合强度的试验新方法。 |
| 关键词: 结合强度 X衍射法(XRD) 薄膜 残余应力 |
| DOI： |
| 分类号:TG174.44 O484.4 |
| 基金项目:国家自然科学基金;江苏省研究生培养创新工程项目 |
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| Experimental Study on Interracial Bonding Strength of the Film by XRD |
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KONG De-jun ZHANG Yong-kang LU Jin-zhong FENG Ai-xin Ren Xu-dong GE Tao
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| Abstract: |
| The stresses and variational laws of the film interface were measured by X-ray diffraction (XRD),and the principle,method and process of measuring interfacial bonding strength of the film were established by measuring of interfacial bonding state.The method of measuring interfacial bonding strength of the film is a non-contact measurement,which is applied to measure interfacial bonding strength of multi-crystal and crystal film,it is a new kind of experimental method to research and measure bonding strength of the film. |
| Key words: bonding strength,X-ray diffraction (XRD),film,residual stress |
