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氮化钛铝薄膜的制备及其摩擦学性能的研究
顾艳红,王成彪,刘家浚
Author NameAffiliation
摘要:
用多弧离子镀方法在高速钢的基体上沉积了不同钛铝比例的氮化钛铝薄膜,研究了不同铝含量对薄膜性能的影响,采SEM、XRD、AES、表面形貌仪、显微硬度计、划痕仪对薄膜的微观结构和力学性能进行了全面测试,用球盘试验机测试了薄膜的摩擦因数,在此基础上讨论了铝在薄膜中的作用。结果表明Al的引入使膜层的硬度明显提高。所有的(Ti,Al)N试样皆由面心立方晶格(fcc)的(Ti0.5Al0.5)N相组成。随着Al含量增加,GCr15与(TiAl)N膜层之间的摩擦因数下降,减摩性能提高,耐磨性能增强。(TiA1)N涂层可以显著提高硬质合金刀具的使用寿命。
关键词:  多弧离子镀 薄膜 (TiAl)N 摩擦学性能
DOI:
分类号:O484
基金项目:
Tribological Properties and Preparation of (Ti,Al)N Coatings on High Speed Steel Substrate
GU Yan-hong1  WANG Cheng-biao1  LIU Jia-jun2
Abstract:
This paper studied the influence of Al/Ti ratio on the performance of (Ti,Al)N coatings. Three Al/Ti ratio targets were used to deposit (Ti,Al)N coatings. Experimental results showing the influence of Al/Ti ratio on composition, surface morphology, adhesion strength, micro-hardness and wear behavior were discussed. Scanning electron microscopy (SEM), Auger electron spectroscopy (AES) and X-ray diffraction (XRD) were used to investigate the composition, microstructure and phases of coatings. The thickness of film was measured with a TalySurf 5-style profilometer. The hardness was measured with micro-hardness tester. The adhesion strengths of (Ti,Al)N were tested with an automatic scratch tester. The friction coefficient was measured on a pin-on-disk friction and wear testing machine. The effect of Al content in the film was studied. The result showed that the hardness of (Ti,Al)N films was much higher than that of TiN and increased with the rise of Al content. All of the (Ti,Al)N coatings were composed of (Ti0.5Al0.5)N(fcc). The friction coefficient between (Ti,Al)N films and 52100 steel decreased with the increase of Al content, and the wear-resistance of (Ti,Al)N films was becoming improved with the rise of Al content as well. The (Ti,Al)N films can be used to improve the lifetime of cutting tools.
Key words:  MIP,thin film,(TiAl)N,tribological properties