| 摘要: |
| 科技发展使军用、船舶、切削等各领域的精密器件所面临的环境更加极端复杂，多元防护涂层因具有良好的综合性能而逐渐取代传统的二三元氮化物，但目前关于 TiAlCr 基多元涂层结构与性能的影响研究尚未报道。通过调控氮气流量(5 ≤ FN ≤ 40 mL / min)，基于磁过滤阴极真空弧(FCVA)技术制备 TiAlCr 基的多元(TiAlCrSi)N 涂层。采用 FESEM、EDS、 XRD、XPS 和 TEM 对涂层的相结构、形貌和成分进行表征，并通过纳米压痕仪、划痕仪和电化学工作站对涂层性能进行表征。结果表明：随着氮气流量增加，涂层由无序致密的非晶相转变为具有柱状晶的(TiAlCr)N 纳米晶 / Si3N4 非晶相的复合结构。FN ≤ 20 mL / min 时，涂层结构以均匀致密的非晶相为主；FN = 20 mL / min 时，涂层的结合强度 LC3(27.1 N)较高， 在 3.5 wt.% NaCl 溶液中拥有较好的耐腐蚀性能(Ecorr = ?0.314 V, Icorr = 2.903 8 μA·cm?2 )；FN ≥ 30 mL / min 时，涂层结构转变为具有柱状晶的(TiAlCr) N 纳米晶 / Si3N4非晶相复合结构，涂层的硬度得到显著提升，达到超硬级别；FN = 40 mL / min 时，涂层拥有良好的力学性能，硬度、弹性模量、H / E 和 H3 / E2 分别为 45.11、460.4、0.098 和 0.433 GPa。通过 FCVA 制备的(TiAlCrSi)N 涂层具有优异的耐腐蚀和力学性能，可为表面防护技术在复杂苛刻环境中的发展提供参考。 |
| 关键词: 磁过滤真空阴极弧 复合结构 超硬涂层 耐腐蚀性 |
| DOI：10.11933/j.issn.1007?9289.20211213004 |
| 分类号:TG174 |
| 基金项目:重庆市技术创新与应用示范(产业类)重点研发(cstc2018jszx-cyzdX0093)、重庆市技术创新与应用发展(面上)(cstc2020jscx-msxm1818)、国家自然科学基金(12005018)、国家科技重大专项(2017-VII-0012-0107)和国家自然科学基金联合基金重点(U1865206)资助项目 |
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| Preparation and Properties of TiAlCr-based Multi-component Coating by Filtered Cathode Vacuum Arc |
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WU Shuai1, ZHAO Yiman1, LIU Shuang1, CHEN Shunian2, QIN Lizhao1, LIAO Bin2, CHEN Lin2, ZHANG Xu2, ZHANG Tonghua1, WANG Keping3, ZHAO Renbing3
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1.College of Materials and Energy, Southwest University, Chongqing 400715 , China;2.Key Laboratory of Beam Technology of Ministry of Education, Beijing Normal University,Beijing 100875 , China;3.Jinmao Textile Equipment Co., Ltd., Chongqing 400715 , China
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| Abstract: |
| Technological advances have made the environment facing precision equipment in military equipment more complex and extreme. TiAlCr-based multi-component protective coatings have gradually replaced the traditional binary and ternary nitride because of its good comprehensive properties. However, the research on the influence of multi-component coatings structure and performance have not been reported. TiAlCr-based multi-component (TiAlCrSi)N coatings are prepared based on filtered cathode vacuum arc (FCVA) technology by regulating the N2 flow rate (5 ≤ FN ≤ 40 mL / min). FESEM, EDS, XRD, XPS, TEM, nanoindenter, scratch meter and electrochemical workstation are selected to characterized the morphology, structure, corrosion resistance and mechanical properties of the coatings, respectively. The results show that the coating is transformed from a disordered dense amorphous phase to a composite structure of columnar (TiAlCr)N nanocrystals / Si3N4 amorphous phase with the increase of N2 flow rate. When FN ≤ 20 mL / min, the coating exhibits uniform and dense amorphous phase structure. The coating (FN = 20 mL / min) has a higher bonding strength LC3 (27.1 N), and better corrosion resistance (Ecorr = ?0.314 V, Icorr = 2.903 8 μA·cm?2 ) in 3.5 wt.% NaCl solution. When FN ≥ 30 mL / min, the coating structure is transformed into a composite (TiAlCr)N nanocrystal / Si3N4 amorphous phase structure with columnar crystals, and the hardness of the coating is significantly enhanced and reaches the ultra-hard level. The coatings possess good mechanical properties at FN = 40 mL / min, with hardness, modulus of elasticity, H / E and H3 / E2 of 45.11, 460.4, 0.098 and 0.433 GPa, respectively. The (TiAlCrSi) N coatings are deposited by FCVA technology has excellent corrosion resistance and mechanical properties, which provides an important reference value for the development of surface protection technology in complex and harsh environments. |
| Key words: filtered cathode vacuum arc compound structure super hard coating corrosion resistance |
