| 摘要: |
| 高质量的金属氧化物薄膜在航天航空、海洋船舶等极端环境下的关键部件有着广泛的应用需求，但传统制备技术易导致薄膜疏松多孔，产生空隙裂纹等缺陷，高功率脉冲磁控溅射技术(HiPIMS)已被证明是一种有效制备无空洞和无弧滴致密薄膜的有效方法。通过 HiPIMS 技术在不锈钢表面制备超薄致密 ZrO2 薄膜，重点研究不同 O2流量下耐腐蚀性能的调控规律。 通过扫描电子显微镜(SEM)、光电子能谱仪(XPS)、X 射线衍射仪(XRD)、原子力显微镜(AFM)、纳米压痕仪(Nano Test P3)、电化学设备(CS300)等对 ZrO2薄膜的表面形貌、物相结构、力学性能、耐腐蚀性能等方面进行研究。研究结果显示， 在 O2流量为 40 mL/ min 时，ZrO2 薄膜的纳米硬度 H 最高为 26.38 GPa，弹性模量 E 为 290.9 GPa；同时，在电化学腐蚀试验中，其自腐蚀电流密度 Icorr达到 45.802 pA / cm2 ，与 304L 不锈钢相比降低了 4 个数量级；电化学阻抗谱(EIS)显示，随 O2流量的增加，容抗弧半径、低频区阻抗值和相角均随之不断增大，进一步表明 O2 流量为 40 min / mL 制备薄膜的耐腐蚀性能最优。通过 HiPIMS 技术能够制备出高质量的 ZrO2 薄膜，其高耐腐蚀性对基体起到了强效的防护作用，对防腐薄膜的研究和应用具有一定参考价值。 |
| 关键词: 高功率脉冲磁控溅射技术 ZrO2薄膜 耐腐蚀 |
| DOI：10.11933/j.issn.1007-9289.20211107001 |
| 分类号:TG156;TB114 |
| 基金项目: |
|
| Corrosion Resistance of ZrO2 Coating Prepared by High Power Impulse Magnetron Sputtering |
|
SUN Li, JIANG Qin, ZHANG Zhiqiang, LI Qian, LIAO Bin, OUYANG Xiaoping
|
|
College of Nuclear Science and Technology, Beijing Normal University, Beijing 100875 , China
|
| Abstract: |
| Corrosion-resistant metal oxide films are widely used in the key parts of aerospace, ocean ships and other extreme environments, but the traditional preparation technology deposits films easily with voids and cracks, and high power impulse magnetron sputtering (HiPIMS) has proven to be an effective method of depositing dense films without voids and cracks. Ultra-thin ZrO2 films are prepared on stainless steel by HiPIMS. The law of variation for corrosion resistance of the films following the O2 flow rate is studied with scanning electron microscope (SEM), photoelectron spectrometer (XPS), X-ray diffractometer (XRD), atomic force microscope (AFM), nano-indenter (Nano Test P3) and electrochemical equipment (CS300). The results reveals that when the O2 flow rate is 40 mL / min, the nano-hardness H and the elastic modulus E achieve to the highest value of 26.38 GPa and 290.9 GPa respectively. Meanwhile, the film prepared under 40 mL / min O2 flow rate exhibits excellent corrosion resistance. The self-corrosion current density Icorr is 45.802 pA / cm2 , four orders of magnitude lower than that of 304L stainless steel. The EIS spectrum shows that the radius of capacitive reactance arc, the impedance value of low frequency region and the phase angle increase continuously with the increase of O2 flow. The strong corrosion-resistant metal oxide films can be achieved by HiPIMS, which plays an important role on protecting the stainless steel. |
| Key words: high power impulse magnetron sputtering technology ZrO2 coatings corrosion resistance |
